求救,8寸晶圆厂的超纯水水质标准

找了半天,总算是找到了!

谢谢诸位的奉献!互相学习:handshake

我想了好久，这个话题很好！！

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Requirements for the Electronics and Semiconductor Industry
(ASTM D5127-99)
Parameter Type E-1 Type E-1.1 Type E-1.2 Type E-2 Type E-3 Type E-4
Linewidth(线宽,微米) 1.0-0.5 0.5-0.25 0.25-0.18 5.0-1 >5.0 ---
Resistivity(MΩ•cm),25℃, 电阻率 18.2 18.2 18.2 17.5 12 0.5
*Temperature 温度
*Pressure 压力
Endotoxin unit （EU/ml） 细菌内毒素 0.03 0.03 0.03 0.25 --- ---
TOC(μg/L) 总有机碳 5 2 1 50 300 ---
Dissolve oxygen (μg/L) 溶解氧 1 1 1 --- --- ---
Residue after evaporation (μg/L)
蒸发残渣 1 0.5 0.1 --- --- ---
SEM particles/L(micron range)
扫描电子显微镜检测
0.1-0.2 1000 1000 200 --- --- ---
0.2-0.5 500 500 100 3000
0.5-1.0 50 50 1 -- 1000 --
10 --- --- --- --- --- 10000
On-line particles/L(micron range)
在线颗粒测试
Particles(＞0.05 micron)
0.05-0.1 500 500 100
0.1-0.2 300 300 500
0.2-0.3 50 50 20
0.3-0.5 20 20 10
>0.5 4 4 1
Bacteria/100mL 细菌
100 mL Sample 100ml水样 1 1 1
1L Sample 1L水样 1 1 0.1 10 10000 100000
Silica 二氧化硅
Silica-total 总二氧化硅,(μg/L) 3 0.5 0.5 10 50 1000
Silica-dissolved 可溶性二氧化硅 (μg/L,微克/升) 1 0.1 0.05 --- --- ---
Ions and metals (μg/L,微克/升)
阴离子与金属 ppb ppb ppb ppb ppb ppb
Ammonium 铵 0.1 0.05
Bromide 硼酸根 0.1 0.05 0.02
Chloride 氯 0.1 0.05 0.02 1 10 1000
Fluoride 氟 0.1 0.05 0.03 --- --- ---
Nitrate 硝酸根 0.1 0.05 0.02 1 5 500
Nitrite 亚硝酸根 0.1 0.05 0.02
Phosphate 磷酸根 0.1 0.05 0.02 1 5 500
Sulfate 硫酸根 0.1 0.05 0.02 1 5 500
Aluminum 铝 0.05 0.02 0.005 --- --- ---
Barium 钡 0.05 0.02 0.001 --- --- ---
Boron 硼 0.05 0.02 0.005 --- --- ---
Calcium 钙 0.05 0.02 0.002 --- --- ---
Chromium 铬 0.05 0.02 0.002 --- --- ---
Copper 铜 0.05 0.02 0.002 1 2 500
Iron 铁 0.05 0.02 0.002 --- --- ---
Lead 铅 0.05 0.02 0.005 --- --- ---
Lithium 锂 0.05 0.02 0.003 --- --- ---
Magnesium 镁 0.05 0.02 0.002 --- --- ---
Manganese 锰 0.05 0.02 0.002 --- --- ---
Nickel 镍 0.05 0.02 0.002 1 2 500
Potassium 钾 0.05 0.02 0.005 2 5 500
Sodium 钠 0.05 0.02 0.005 1 5 1000
Strontium 锶 0.05 0.02 0.001 --- --- ---
Zinc 锌 0.05 0.02 0.002 1 5 500

查国标电子I级水标准